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Physical Vapour Deposition & Characterisation Facility

The PVDCF covers three themes quintessential to device production, namely: a) deposition, b) fabrication and c) charactersation.

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The Physical Vapour Deposition and Characterisation Facility includes the following key features:

Deposition:

  • AJA Sputtering system: Highly versatile RF and DC magnetron sputtering system.
  • Electron beam evaporator: Can grow high purity polycrystalline metallic films such as Au, Nb, Pt, V, Al, and Cu.
  • Custom sputtering systems: The facility hosts four custom built DC magnetron sputtering systems. 

Fabrication:

  • Dual beam microscope: Zeiss Crossbeam 540 is a Dual Beam microscope which combines high resolution field emission scanning electron microscopy (FE-SEM) and advanced focussed ion beam (FIB) processing.
  • Suss MJB3 Mask aligner and Argon ion miller: The argon ion miller allows for anisotropic and non-selective etching of devices. Suitable for metallic or insulating materials.
  • Electron-beam lithography system: LEO /ZEISS 1455VP scanning electron microscope equipped with Raith Elphy Quantum for device fabrication.

Characterisation:

  • Atomic force microscope: A Bruker Multimode 8 with Nanoscope 5 controller.
  • Vibrating Sample Magnetometer: Lake Shore Cryotonics 8600 series vibrating sample magnetometer (VSM).
  • Magnetic Property Measurement System (Quantum Design MPMS): This system uses superconducting magnets to reach up to 7 T, with a temperature range from 1.8 to 400 K. A Superconducting Quantum Interference Device (SQUID) allows for extremely accurate magnetic field sensing.
  • 9 T cryo-free system: It uses a superconducting magnet to apply a maximum magnetic field corresponding to 9 T. Sample temperatures can reach 1.7 K to 315 K in its default operation. Samples can be loaded both in-plane and out-of-plane.
  • Cryogenic DC/RF Probe station: Lake Shore Cryogenics CRX-6.5K


The Henry Royce Institute for advanced materials at the University of Cambridge

This facility includes equipment funded by Royce. Royce was formed by the Engineering and Physical Sciences Research Council (EPSRC) to support advanced materials research through the provision of state-of-the-art equipment, and by facilitating industry–academia interactions to achieve technology translation. Royce at Cambridge offers funding opportunities for students, researchers and SMEs to access their equipment.